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21st century education is centralized education for students, this is estimated by students to have some skills in the level of education that have been obtained. One of the skills that must be owned by students is Science Process Skills. Science Process Skills (SPS) are scientific skills that students use to get, develop, and apply scientific concepts and theories from learning that has been obtained. By improving students' skills from getting, developing, and applying, the understanding of learning will also be better. Besides being useful for improving understanding of learning, SPS also has benefits in the daily lives of students. An example is in students' motivation and independence in solving a problem, so students are not entirely dependent on the teacher. The purpose of this research is to empower students' Science Process Skills in Thermochemistry material with the module of 5E Learning Cycle integrated with STEM. This research was conducted in three high schools in Kediri, in class XI. This research method is a pre-test post-test design research by providing students with a module of 5E Learning Cycle that is integrated with STEM, and SPS question. The reliability obtained by the RASCH model, with the reliability of the SPS question is 0.83. The t-test show that module used can empower the SPS of students in high school in Kediri, and it can show from the experimental class compared with the control class. It can be concluded Module 5E Learning integrated with STEM can be used in thermochemical material to empower the skills process for students.

21st century education, 5E Learning Cycle, Module, Science Process Skill, STEM, Thermochemistry